![]() ![]() The mod you are trying to view has ceased development and consequently been archived. AutoER-II Automatic Ellipsometer Instruction Manual. The Rudolph Ellipsometer is a version of the AutoEL II Automatic Ellipsometer. College of Engineering and Applied Science 2901 Woodside Drive, Cincinnati OH 45221. ![]() Equipment Name: Rudolph Auto EL III Ellipsometer. The purpose of this document is to detail the use of the Rudolph Ellipsometer Auto -EL. The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. Automatic or manual wafer loading can be used with small pieces or full wafers up to 8” diameter. Equipment: Rudolph Research Auto EL III Ellipsometer.
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